THE ESTABLISHMENT OF HIGH-TEMPERATURE SENSORS OF MECHANICAL VALUES. MATERIALS.
CONSTRUCT. ТECHNOLOGY 

Mikhailov Petr Grigorievich, doctor of technical sciences, professor, sub-department of information resources management, Penza branch of Gubkin Russian State University, petr.mixsjlov.49@mail.ru
Mokrov Evgeny Alekseevich, doctor of technical sciences, professor, sub-department of instrument making, Penza State University, kiltem-12@mail.ru
Skotnikov Valery Vladimirovich, postgraduate student, Penza State University, sko_val@mail.ru
Tyutyunikov Dmitry Aleksandrovich, postgraduate student, Penza State University, tyutyunikov@mail.ru
Petrin Vladimir Alekseevich, postgraduate student, Penza State University, vlad.petrin@mail.ru

 621. 865. 8

The article is devoted to materials science and structural and technological problems that arise in the creation of high-temperature sensors of mechanical values, in particular, static and dynamic pressures. Considered and selected functional materials used in semiconductor elements of high-sensitive sensor. As the base material for the sensors is provided a polycrystalline silicon.

high temperature, monosilicon, sensor, the functional material, polysilicon, diamond, silicon carbide, modification, film